Free-electron laser driven by fiber laser-based laser plasma accelerator

ABSTRACT

A Free Electron Laser source includes: a fiber-based laser having a plurality of amplifying fibres wherein an initial laser pulse is distributed and amplified, and element for grouping together the elementary pulses amplified in the fibre in order to form an a single amplified global laser pulse; a laser plasma accelerator wherein the global laser pulse generates relativistic electron beams, a beam focusing system transporting electron beams from the laser plasma accelerator, an undulator wherein relativistic electron beams generate an electromagnetic beam, and a beam separator system, wherein the electron beam and the electromagnetic beam are separated.

1. CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a Section 371 National Stage Application of International Application No. PCT/EP2014/069222, filed Sep. 9, 2014, the content of which is incorporated herein by reference in its entirety, and published as WO 2015/032995 on Mar. 12, 2014, in English.

2. FIELD OF THE INVENTION

The invention relates to a new embodiment of a Free-Electron Laser (“FEL”).

The invention also relates to the use of such a Free-Electron Laser as an Extreme UltraViolet (“EUV”) light sources for Extreme UltraViolet lithography.

3. BACKGROUND OF THE INVENTION

Background of Free-Electron Lasers (“FEL”) A Free-Electron laser (FEL), is a type of laser that use a relativistic electron beam that moves freely through a magnetic structure, in order to create a beam consisting of coherent electromagnetic radiation that can reach high power. In this type of laser, the free electron beam is the lasing medium. The free-electron laser has the widest frequency range of any laser type, and can be widely tunable, currently ranging in wavelength from microwaves, through terahertz radiation and infrared, to the visible spectrum, ultraviolet, and X-ray.

To create a Free-Electron Laser, a beam of electrons is accelerated to almost the speed of light. The beam passes through the Free-Electron Laser oscillator, a periodic transverse magnetic field produced by an arrangement of magnets with alternating poles within an optical cavity along the beam path. This array of magnets is commonly configured as an undulator, because it forces the electrons in the beam to follow a sinusoidal path. The acceleration of the electrons along this path results in the release of photons (synchrotron radiation). Since the electron motion is in phase with the field of the light already emitted, the fields add together coherently. The wavelength of the light emitted can be readily tuned by adjusting the energy of the electron beam or the magnetic field strength of the undulators.

A free-electron laser requires the use of an electron accelerator, which is very voluminous, requires a high voltage supply, has a very low repetition rate and is expensive.

Background of Extreme Ultraviolet (“EUV”) Light Sources

Extreme UltraViolet (“EUV”) with wavelengths below about 50 nm and more specifically around and below 13.5 nm can be used in microlithography processes to enhance the resolution of optical systems that are limited by the diffraction limit of light accompanying miniaturization of semiconductor integrated circuits. This technology called as extreme ultraviolet lithography (EUVL) is capable of providing resolution below 30 nm that had been impossible with conventional optical lithography that utilizes deep ultraviolet (DUV) light sources with wavelengths of 248 nm or 193 nm.

The current technologies for generating high power Extreme UltraViolet radiation at 13.5 nm, referred to as laser produced plasma (LPP), employs the deposition of laser energy into a source element, such as xenon (Xe), tin (Sn) or lithium (Li), creating ionized gas microplasma at electron temperatures of several tens of electron volts. As these highly excited ions decay, energetic radiation is emitted in all directions of 4π radians.

One particular laser produced plasma (LPP) technique involves irradiating molten tin droplets with one or more pre-pulse(s) followed by a main pulse. In this regard, CO₂ lasers at the wavelength of 10.6 μm provide certain advantages as a drive laser producing main pulses in the laser produced plasma (LPP) process thanks to the ability to produce a relatively high conversion efficiency, i.e., the ratio of output Extreme UltraViolet in-band to drive laser input power.

For Extreme UltraViolet lithography, the 13.5 nm radiation is collected by a mirror (either grazing incidence or normal incidence) and focused to an intermediate focal point where it is relayed to the scanner optics and, ultimately, the wafer.

For example, one apparatus currently being developed with the goal of producing about 100 W at the intermediate location contemplates the use of a pulsed, focused 10-12 kW CO₂ drive laser which is synchronized with a droplet generator to sequentially irradiate about 40 k-100 k tin droplets per second. For this purpose, there is a need to produce a stable stream of droplets at a relatively high repetition rate (e.g. 40-100 kHz or more) and deliver the droplets to an irradiation site with high accuracy and good repeatability in terms of timing and position, i.e., with very small jitter, over a relatively long period of time.

The current laser produced plasma (LPP) radiation sources have a serious obstacle on the way to a high volume manufacturing (HVM) source such as small efficiency of the radiation source, a limited set of discrete wavelengths and the mitigation of the plasma debris required for the protection of Extreme UltraViolet optics.

Background of Free Electron Laser Used as Extreme UltraViolet Light Sources

Free-Electron Laser based radiation sources have evident advantages in wavelength tunability, high efficiency and high output power, compared to current laser produced plasma (LPP) radiation sources. The problem of debris mitigation does not exist at all. There is no need to use a multilayer coated reflective collector, of which reflectivity is limited to about 70%, since the radiation is produced in the diffraction limited volume. Hence, there is no problem with the transport of radiation to the exposure system. Harnessing such advantages of Free-Electron Laser based Extreme UltraViolet radiation sources liberated from the debris mitigation and a mechanical targeting system such as a droplet generator, the Free-Electron Laser based Extreme UltraViolet radiation source may have an average output power of 0.5 kW at a repetition rate of at least 250 kHz for meeting the requirements of the light source at 13.5 nm for the next generation lithography.

A proposed Free-Electron Laser based Free-Electron Laser producing a kW-level average output power of Extreme UltraViolet radiation utilizes high-energy electron beams of the order of 1 GeV generated from a radio-frequency (RF)-based linear accelerator that comprises a high-brightness electron injector typically composed of a photocathode RF gun or thermionic high-voltage DC gun and several buncher cavities for producing electron bunches, a several-stage magnetic bunch compressor system comprising a sequence of RF structure and bending magnets for compressing a bunch length and increasing a peak beam current and a main linac composed of a series of room-temperature or superconducting RF cavities with the accelerating gradient of the order of 10 MV/m and a beam transport system including beam focusing and defocusing electro-quadrupole magnets, lastly followed by undulators with a total length of 30 m, providing alternating magnetic fields to force electrons on a sinusoidal trajectory so that all electrons in a electron bunch emit coherently due to the microbunching process, called as self-amplified spontaneous emission (SASE) Free-Electron Laser. The overall size of a RF linac-driven Free-Electron Laser-based Extreme UltraViolet light source may require a 250 m long facility for a linac-based light source or a 120 m long, 60 m wide area for a recirculator-based light source. The costs for construction and operation of such facility may turn out incredibly so large as to prevent the Free-Electron Laser-based Extreme UltraViolet light sources from industrial realization of the next generation lithography technology.

4. SUMMARY OF THE INVENTION

An exemplary aspect of the present disclosure relates to a Free Electron Laser source generating an electromagnetic beam presenting a wavelength, called Free Electron Laser wavelength, belonging to the range from 5 nm to 15 nm, said Free Electron Laser comprising:

-   -   a fiber-based laser, comprising a plurality of amplifying fibres         wherein an initial laser pulse is distributed and amplified, and         means for grouping together the elementary pulses amplified in         the said fibre in order to form an a single amplified global         laser pulse, and comprising a stretching device able to stretch         out in time said initial laser pulse, according to the chirped         pulse amplification technique and a grating pulse compressor         able to compress in time the said single amplified global laser         pulse, according to the chirped pulse amplification technique,     -   said fiber-laser being tuned using at least one parameter,         called fiber-based laser parameter,     -   said at least one fiber-based laser parameter being obtained as         a function of said Free Electron Laser wavelength;     -   a laser plasma accelerator wherein, in a bubble regime of said         plasma accelerator said global laser pulse generates         relativistic electron beams, said laser plasma accelerator being         tuned using at least one parameter, called laser plasma         accelerator parameter, said at least one laser plasma         accelerator parameter being obtained as a function of said Free         Electron Laser wavelength;     -   a beam focusing system transporting electron beams from the         laser plasma accelerator to an undulator;     -   said undulator wherein relativistic electron beams generate an         electromagnetic beam, a peak magnetic field and a period of said         undulator being previously set,     -   said undulator being tuned using at least one parameter, called         undulator parameter, said at least one undulator parameter being         obtained as a function of said Free Electron Laser wavelength;     -   a beam separator system, wherein the said electron beam and the         said electromagnetic beam are separated.         Thanks to the particular combination of the elements         constituting said Free Electron Laser, the Free Electron Laser         source, or Free Electron Laser, according to the invention is         more compact and efficient, cheaper and has a higher repetition         rate and a higher average power as the prior art Free Electron         Laser sources.

Such a result can only be obtained because of the particular tuning technique implemented according to the present invention. Indeed, as detailed in the following section 6.5 the tuning of the components of said Free Electron Laser is optimised since at least one parameter of the fiber-based laser (e.g. the average fiber laser power, the required pulse duration, the match spot radius, the peak power, laser energy pulse, etc.), at least one parameter of the laser plasma accelerator (e.g. the electron beam energy, the plasma density, the accelerator length, etc.), and at least one parameter of the undulator (e.g. the Pierce Parameter, the saturation length, the total number of periods, etc.) are all tuned as a function of the Free Electron Laser wavelength, when the peak magnetic field and the period of the undulator have been previously set.

Thus, all the essential components of the Free Electron Laser are tuned in synergy as a function of a same parameter, which corresponds to the Free Electron Laser wavelength. Such a relation between all the major parameters of the FEL is not trivial and requires an inventive step.

Such a synergy between the components constituting said Free Electron Laser is neither disclose nor suggest by the prior art, which does not give any concrete solution for designing and implementing a Free Electron Laser whose wavelength belongs to the range from 5 nm to 15 nm.

Indeed, considering the disclosure of Wiggins S. M. and al. (“High Quality electron beams from a laser wakefield accelerator”, Conference on Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser science Conference (QELS), 2010 pages 1-2 XP031701440), only a classical Laser-Plasma Accelerators towards X-rays combined with a classical undulator are disclosed. Such elements are designed to create an ALPHA-XLWFA line, which could be used for a FEL operation. It has to be noted that such a document discloses only beam transport simulations to illustrate how an FEL laser operating in the VUV using current 100-150 Mev electron Beams can be implemented, and disclose only that a compact x-ray FEL should be possible by scaling the LWFA to the gigaelectronvolt range without disclosing any solution to achieve it. Thus, it can be noticed that no full and effective implementation of a FEL with a wavelength range from 5 nm to 15 nm is disclosed by Wiggins S. M, which underlines that, at the time of the publication of this document, proposing such an effective implementation is tricky and not trivial.

In addition, Wiggins S. M. does not disclose that at least one parameter of the laser plasma accelerator, and at least one parameter of the undulator, are obtained as a function of said Free Electron Laser wavelength.

Even if the one skilled in the art would replace the laser disclosed by Wiggins S. M. by the one disclosed by Tajima T (“ICAN: The next Laser Powerhouse”, Optics and Photonics news, & May 2013, pages 36-43 XP0055101291), he would not obtained a FEL according to the present invention.

Indeed, the laser disclosed by Tajima, which uses optical fibers (as the one according to the present invention), is not designed such that its major parameters depend all on the Free Electron Laser wavelength. Indeed, no FEL is disclosed by Tajima, who discloses only a use of such fiber-based laser to treat nuclear waste.

Thus the combination of the Alpha-XLWFA beam line of Wiggins S. M. on the one hand with the laser disclosed by Tajima on the other hand would not lead to an effective and usable FEL with a wavelength ranging from 5 nm to 15 nm, since the laser plasma accelerator and the undulator of Wiggins are tuned for delivering 70-150 Mev electron beams, independently from the laser disclosed by Tajima dedicated to treat nuclear waste.

Such a combination can not simply work since a laser able to deliver a gigaelectronvolt is not adapted to be combined with laser plasma accelerator and the undulator of Wiggins tuned for delivering 70-150 Mev. Indeed, combining these elements is a tricky issue and no solution about a workable combination is disclosed or suggested.

Thus, such combination of prior art documents can not lead to achieve a concrete and efficient implementation of a FEL with a wavelength ranging from 5 nm to 15 nm.

Thanks to the particular tuning in synergy of all the elements constituting the FEL according to the invention, concrete compact and efficient FELs are designed (see Table 1 and Table 2 in the following), which make them usable for industrial lithography. Thus, a great achievement is obtained regarding the prior art, which was aiming to obtain one day such an efficient FEL.

Furthermore, using this chirped pulse amplification technique (CPA), the fiber-based laser can emit pulses of very high energy.

Preferably, said laser plasma accelerator comprises:

-   -   a first gas cell filled with mixed gas, and     -   a second gas cell filled with pure helium gas.     -   a gas feeding system.

Such a laser plasma accelerator is very efficient, with a very high repetition rate.

Preferably, said laser plasma accelerator comprise means for modifying the length of the said second gas cell.

The wavelength of the electromagnetic beam emitted by the Free Electron Laser source can then be tuned.

Preferably said beam separator system comprises a dipole magnet for bending electron beams and a beam dump.

It has to be noticed that as detailed later the permanent magnet dipole length required for deflecting depends on the electron beam energy E_(b), which depends itself on the FEL wavelength as detailed is section 6.5.

Advantageously, said electromagnetic beam is a Extreme UltraViolet beam.

The Free Electron Laser according to this embodiment can provide a Extreme UltraViolet source usable for lithography application. Such a Extreme UltraViolet source is more compact and efficient, cheaper and having a higher repetition rate and a higher average power as the prior art Extreme UltraViolet sources.

According to a preferred embodiment, said Extreme UltraViolet beam wavelength is 13.5 nm.

According to an other possible embodiment, said Extreme UltraViolet beam wavelength is 6.7 nm.

5. BRIEF DESCRIPTION OF THE DRAWINGS

The invention will become more fully understood from the following description of preferred but non-limiting embodiments thereof, described in connection with accompanying drawings, wherein:

FIG. 1 shows a schematic diagram of a Free Electron Laser according to an embodiment of the invention, usable as an Extreme UltraViolet light source.

FIG. 2 illustrates a schematic diagram of a coherent combining fiber-based drive laser used in the Free Electron Laser of FIG. 1.

FIG. 3 shows the two-stage gas cell plasma accelerator of the Free Electron Laser of FIG. 1.

FIG. 4 shows the laser plasma electron accelerator system of the Free Electron Laser of FIG. 1, comprising the gas cell plasma accelerator of FIG. 3.

FIG. 5 illustrates schematically electron acceleration mechanism due to laser wakefield.

FIG. 6 shows a schematic view of a miniature permanent magnet quadrupole (PMQ).

FIG. 7 shows an example of a beam focusing system comprising four permanent magnet quadrupoles (PMQ) of the type represented by FIG. 6.

FIG. 8 shows schematically a planar undulator made of pure permanent magnets producing a vertical field.

FIG. 9 shows schematically a hybrid planar undulator made of permanent magnets and ferromagnetic material, e.g., iron or cobalt steel.

FIGS. 10A and 10B show a schematic assembly of the undulator used in the Free Electron Laser of FIG. 1.

FIGS. 11A, 11B and 11C shows a monolithic beam dump system comprising a permanent magnet dipole separating electron beams from Extreme UltraViolet radiation and a electron beam dump.

FIG. 12 illustrates a setup of a compact self-amplified spontaneous emission (SASE) Free-Electron Laser system comprising the beam focusing system of FIG. 4, the compact undulator of FIG. 5 and the beam dump system of FIG. 6.

FIG. 13 illustrates schematically the Extreme UltraViolet light source of FIG. 1, based on a compact Free-Electron Laser driven by a fiber laser-based plasma accelerator according to aspects of an embodiment of the present invention,

FIG. 14 illustrates how the parameters of each component constituting the Free-Electron Laser of FIG. 1, are obtained as a function of the Free-Electron Laser wavelength according to aspects of an embodiment of the present invention

6. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS OF THE INVENTION 6.1 General Description of a Free-Electron Laser According to an Embodiment of the Invention

With initial reference to FIG. 1, there is shown a schematic diagram of a proposed Free-Electron Laser according to one aspect of an embodiment. As shown in FIG. 1, and described in further detailed below, the proposed Free-Electron Laser may include a drive laser system 1 for generating high energy laser pulses at a high repetition rate of the order of 1 MHz and delivering intense laser pulses 3 compressed through a pulse compressor chamber 2 into a laser plasma accelerator chamber 4. Such a laser-driven Free-Electron Laser can be used as an Extreme UltraViolet light source.

Fibre-Type Laser

FIG. 2 shows an item of drive laser system 1 for producing high-energy laser pulses.

In this drive laser system 1, a low-energy laser pulse 810 is produced by an oscillator 81. This pulse 810 is then stretched out in time, according to the chirped pulse amplification (CPA) technique, by a stretching device 82, comprising a pair of diffraction gratings 821 and 822, having the effect of offsetting in time the various spectral components of the original low-energy pulse 810. The stretched pulse 820 then has a lower peak power and a longer duration of the pulse 810.

This laser pulse 820 is then distributed in a plurality of amplifying fibres 831 forming a first amplifying stage 83 of the fibre-type laser amplifier. The various fibres are separated from one another so as to make it possible to cool them effectively. Each of the amplifying fibres 831 comprises a core made from doped material, and is optically pumped, so as to optically amplify the laser pulse flowing in the fibre. The pulse passing through each of these amplifying fibres 831 is then amplified, and is then itself distributed in a plurality of amplifying fibres 841 forming the second amplification stage 84 of the fibre-type laser amplifier. Once again, the pulse passing through each of these amplifying fibres 841 is amplified and is then itself distributed in a plurality of amplifying fibres 851 forming the third amplification stage 85 of the fibre-type laser amplifier. Thus, in each amplification stage, the pulse is amplified in a plurality of fibres independent of one another and then divided so that pulses of lower power are transmitted to each of the higher-level amplification fibres.

The third and last amplification stage 85 then comprises a very large number of amplifying fibres, for example around 10⁶. Each of the amplifying fibres of this third stage is extended by a transmission fibre having a very low loss level. The transmission fibres are collected together in a cluster 86 so that the pulses emerging from each of the ends of these transmission fibres are emitted in parallel and juxtaposed. These pulses then form a single amplified global pulse 860.

This amplified global pulse 860 is compressed timewise by a compressor 87, located in the pulse compressor chamber 2. This compressor 87 comprises a pair of diffraction gratings 871 and 872, grouping together in time the various spectral components of the pulse. The pulse 3 emerging from this temporal compressor 17 then has a very high energy and very short duration.

Two Stages Gas Cell Plasma Accelerator with Ionization-Induced Injection

As shown in FIG. 1, the ultrashort intense laser pulse 3 is focused by an off-axis parabolic mirror 5 on the entrance of a two-stage gas cell 6, of which the first cell referred to an injector is filled with a mixed gas, e.g., helium gas mixed with nitrogen, and the second cell referred to as an accelerator is filled with a pure gas, e.g., hydrogen or helium. The gases are fed through a gas flow control system 7 to the two-stage gas cell separately at the different pressures.

As described below, in the injector of the gas cell 6, the said laser pulse 3 excites large-amplitude plasma wakefields, of which an accelerating electric field can trap plasma electrons exclusively out of the inner shell electrons and accelerate them owing to ionization-induced injection. A pre-accelerated electron beam 10 from the injector is further accelerated to the relativistic energy of the order of 1 GeV in the accelerator stage of the gas cell 6, where the laser pulse generates plasma wakefields of the order of 1 GV/cm. A transmitted laser light is directed through a mirror with a beam hole 8 to a recovery box 9 that includes diagnostics and absorbers of the transmitted laser pulses.

This plasma accelerator is particularly advantageous when it is combined with a fiber-based laser, a beam focusing system, an undulator and a beam separator system according to the invention. However, such a laser plasma accelerator comprising a first gas cell filled with mixed gas, and a second gas cell filled with pure helium gas can also be combined with an other type of laser, for producing relativistic electron beams.

Beam Focusing System, Undulator and Separation Chamber

The output electron beam 10 from the laser plasma accelerator chamber 4 is transported into an undulator 13 through a beam focusing system 12, installed in a radiation chamber 11. As described below, the electron beam 10 focused by quadrupole magnetic field of the beam focusing system 12 generates the resonantly amplified Extreme UltraViolet radiation 14 due to self-amplified spontaneous emission (SASE) mechanism when passing through the alternating dipole magnetic fields of the undulator 13 that force the electron bunch on a sinusoidal trajectory.

After passing through the undulator 13, the electron bunch is decelerated so strongly that it becomes non-resonant and could not contribute to the amplification of the Extreme UltraViolet radiation, i.e., the onset of saturation. The decelerated electron beam 10 is separated from the Extreme UltraViolet radiation 14 in the dipole magnetic field of the deflection magnet 16 and dumped to a beam dump 17, while the saturated Extreme UltraViolet radiation 14 is extracted from a beam separation chamber 15 and directed to a Extreme UltraViolet lithography scanner/stepper.

6.2. Detailed Description of the Laser Plasma Accelerator Chamber

Two-Stage Gas Cell

FIG. 3 shows schematically a two-stage gas cell 6 comprising an injector stage 21 and an accelerator stage 24 for efficient electron trapping and acceleration in laser wakefields. As shown in FIG. 4, the two-stage gas cell is set up in a laser plasma accelerator chamber 4 and a compressed laser pulse 3 from the pulse compressor chamber 2 is focused on the entrance of the injector gas cell by an off-axis parabolic mirror 5 with a F-number, e.g., 20.

The injector cell 21 is filled with a mixed gas, e.g., 98% He and 2% N₂, fed through a gas feedthrough 20 from the gas flow control system 7. The accelerator cell 24 is filled with a pure gas, e.g. H₂ or He, fed through a gas feedthrough 24 from the gas flow control system 7. A length of the accelerator stage is variably adjusted with a bellows structure 25 driven by a motorized actuator 26. Such an adjustment can permit to reuse easily the accelerator stage, using said motorized actuator 26, for different Free-Electron laser wavelengths ranging from 5 nm to 15 nm. The laser plasma accelerator chamber 4 is pump out by a vacuum pump system 27 to keep an inside pressure of 10⁻³-10⁻⁴ Pa.

Description of the Physical Process

FIG. 5 illustrates schematically a physical process 100 for the wakefield excitation and electron trapping and acceleration in wakefields, which are generated when an intense laser pulse propagates a neutral mixed gas in the injector 21. In FIG. 5, the evolution of plasma electron density is shown in the upper plot 101 and the excited longitudinal wakefield is shown in the lower plot 102.

As shown in the central part 100 of FIG. 5, He and the outer shell electrons up to N⁵⁺ are fully ionized in the leading front of the laser pulse with intensity 1.5×10¹⁶ W/cm² to produce plasma electrons in the outer region of the laser pulse, of which the boundary is indicated by a thin dotted line 103. Since two inner shell (K-shell) electrons of N⁶⁺ and N⁷⁺ are ionized at the laser intensity higher than 1×10¹⁹ W/cm², the inner shell electrons are produced only near the peak intensity of the laser pulse 3, of which the intensity profile is indicated by a thick dotted line 108 for the normalized laser field a₀≃0.855×10⁻⁹I^(1/2) [W/cm²]λ_(L) [μm]=2 where I [W/cm²] is the intensity and λ_(L) [μm] is the laser wavelength. In the upper plot 101, a thick solid curve 109 indicates the evolution of ionization level of nitrogen (the electron number of ionized nitrogen atom) along the propagation axis. A boundary of the plasma region containing the inner shell electrons from ionized N⁶⁺ and N⁷⁺ is indicated by a thin dashed line 104.

Plasma electrons contained in the boundary 103 are blown out by radiation pressure (ponderomotive force) of the laser pulse 3 with the relativistic intensity a₀ 1 and form a narrow dense electron sheath surrounding a spherical ion column behind the laser pulse, often referred to as a bubble 105. Such charge separation generates a strong longitudinal electric field 110 of the order of 100 GV/m at a plasma electron density of 10¹⁸ cm⁻³, which is three orders of magnitude higher than an accelerating field of conventional RF accelerators. In the bubble 105, an electron undergoes a strong focusing force simultaneously. Hence, once electrons 10 are trapped into a bubble, they are efficiently accelerated up to high energy of the order of 1 GeV over a dephasing length of the order of 1 cm, where accelerated electrons outrun a proper accelerating phase.

The said inner shell electrons from ionized N⁶⁺ and N⁷⁺ are located near the bubble center on the propagation axis, where the wake potential is a maximum and the expelling ponderomotive force of the laser pulse is a minimum. Contrary to pre-ionized free electrons, whose trajectories move along a narrow sheath outside the bubble, the ionized electrons emitted from the inner shell move close to the bubble axis toward the back of the bubble where the wake potential is a minimum, and eventually trapped into the wakefield in condition that electrons gain a sufficient kinetic energy required for trapping, as shown in the electron trajectory 106, while the electron shown in the trajectory 107, ionized earlier and off-axis, slips over the potential well and is not trapped. This mechanism called as ionization-induced injection occurs at the intensity as low as the optical field ionization threshold for the inner shell electrons of impurity gas and significantly increases the trapped charge. As trapping occurs close to the bubble axis, amplitudes of the betatron oscillation after trapping decrease compared to the self-injection from the electron sheath. According to theoretical considerations on the ionization-induced injection, for trapping electrons ionized at the peak of the laser electric field, the minimum laser intensity is given by 1−γ_(p) ⁻¹≦0.64a₀ ², where γ_(p) is the Lorentz factor defined as γ_(p)=(1−β_(p) ²)^(−1/2) and β_(p) is the phase velocity of the plasma wave. For electrons to be trapped at or in front of the laser envelope, the intensity must be a₀≧21.7 for γ_(p)=33. The 1D PIC simulations show that the maximum number of trapped electrons is saturated to be approximately N_(e max)˜5×10⁶ μm⁻² at the mixed gas length L_(mix)=1000λ₀ for the plasma density n_(e)=0.001n_(c) (1.7×10¹⁸ cm⁻³) with the nitrogen concentration of α_(N)=1%, and the laser parameters a₀=2 and cτ₀≈15λ₀ due to the beam loading effects and initially trapped particle loss from the separatrix in the phase space, where λ₀ is the laser wavelength and n_(c) is the critical plasma density defined as n_(c)=m_(e)ω_(L) ²/4πe²=π/(r_(e)λ_(L) ²)=1.115×10²¹ [cm⁻³]/(λ_(L) [μm])². The number of trapped electrons scales as N_(e) [μm⁻²] 8×10⁷α_(N)k_(p)L_(mix)(n_(e)/n_(c))^(1/2) for α_(N)k_(p)L_(mix)≦2. The energy spread is also proportional to both the mixed gas length and the nitrogen concentration. According to the 2D-PIC simulation for a₀=2, the energy spread of a trapped electron beam may scale as δE/E=0.02[%](L_(mix)/λ_(L))(n_(e)/10¹⁷ cm⁻³)^(−1/2), while the transverse normalized emittance is estimated to be ε_(n0)=0.5 [μm]a₀ ^(1/2)(n_(e)/10¹⁷ [cm⁻³])^(−1/2).

In the bubble (blowout) regime for a₀≧2, since an electron-evacuated cavity shape is determined by balancing the Lorentz force of the ion sphere exerted on the electron sheath with the ponderomotive force of the laser pulse, the bubble radius R_(B) is approximately given as k_(p)R_(B)≈2√{square root over (a₀)}, where k_(p)=(4πr_(e)n_(e))^(1/2) is the plasma wavenumber evaluated with the unperturbed on-axis density n_(e), and the classical electron radius r_(e)=e²/m_(e)c²=2.818×10⁻¹³ cm with electron charge e, mass m_(e) and vacuum light velocity c. The accelerating field E_(z) is given by E_(z)/E₀=(½)αk_(p)R_(B), where E₀=mcω_(p)/e≈96 [GV/m](n_(e)/10¹⁸ [cm⁻³])^(1/2) and α represents a factor taking into account the beam loading and the difference between the simulation and theoretical estimation. The maximum energy gain limited due to dephasing is given by

Δγ_(max) =W _(max) /m _(e) c ²=(⅔)ακ_(self) a ₀(n _(c) /n _(e)),

where κ_(self)=(a₀ ²/8){(1+a₀ ²/2)^(1/2)−1−ln([(1+a₀ ²/2)^(1/2)+1]/2)}⁻¹ is a correction factor of the group velocity for a self-guided relativistic laser pulse, of which the relativistic factor related to the group velocity β_(g)=v_(g)/c is given by γ_(g) ²=1/(1−β_(g) ²)≈κ_(self)(ω_(L) ²/ω_(p) ²)=κ_(self)(n_(c)/n_(e))=κ_(ch)γ_(g0) ², where γ_(g0)=ω_(L)/ω_(p) is the relativistic factor for the linear group velocity for a₀ ² 1. The dephasing length L_(dp) for self-guided bubble regime is given by k_(p)L_(d)≈(⅔)k_(p)R_(B)γ_(g) ²=(4/3)√{square root over (a₀)}κ_(self)(n_(c)/n_(e)). The important parameters of a laser plasma accelerator for reaching a given energy E_(b) are summarized as follows:

The operating plasma density is determined by

$n_{e} = {{\frac{2}{3}\alpha \; \kappa_{self}a_{0}\frac{n_{c}}{\Delta \; \gamma_{{ma}\; x}}} \approx {1.9 \times {10^{18}\left\lbrack {cm}^{- 3} \right\rbrack}\kappa_{self}{a_{0}\left( \frac{1\mspace{14mu} {\mu m}}{\lambda_{L}} \right)}^{2}{\left( \frac{200\mspace{14mu} {MeV}}{E_{b}/\alpha} \right).}}}$

The accelerator length is set to be equal to the dephasing length as

$L_{acc} = {L_{dp} \approx {\sqrt{\frac{3}{2}}\frac{\left( {\Delta \; {\gamma_{{ma}\; x}/\alpha}} \right)^{3/2}}{\pi \; \kappa_{self}^{1/2}a_{0}}\lambda_{L}} \approx {\frac{3.1\lbrack{mm}\rbrack}{\kappa_{self}^{1/2}a_{0}}\left( \frac{\lambda_{L}}{1\mspace{14mu} {\mu m}} \right)\left( \frac{E_{b}/\alpha}{200\mspace{14mu} {MeV}} \right)^{3/2}}}$

The pump depletion length due to pulse front erosion becomes

${L_{pd} \approx {c\; \tau_{L}\frac{n_{c}}{n_{e}}}} = {{\frac{3}{2}\frac{c\; \tau_{L}{\Delta\gamma}_{\max}\text{/}\alpha}{\kappa_{self}a_{0}}} \approx {\frac{5\lbrack{mm}\rbrack}{\kappa_{self}a_{0}}\left( \frac{\tau_{L}}{30\mspace{14mu} {fs}} \right)\left( \frac{E_{b}\text{/}\alpha}{200\mspace{14mu} {MeV}} \right)}}$

The pulse duration required for satisfying a dephasing length longer than a pump depletion length is

$\tau_{L} \geq {{18\lbrack{fs}\rbrack}{\kappa_{self}^{1\text{/}2}\left( \frac{\lambda_{L}}{1\mspace{14mu} \mu \; m} \right)}\left( \frac{E_{b}\text{/}\alpha}{200\mspace{14mu} {MeV}} \right)^{1\text{/}2}}$

The matched spot radius is given by

$r_{m} \approx {{3.9\left\lbrack {\mu \; m} \right\rbrack}\frac{R_{m}}{\sqrt{\kappa_{self}a_{0}}}\left( \frac{\lambda_{L}}{1\mspace{14mu} \mu \; m} \right)\left( \frac{E_{b}\text{/}\alpha}{200\mspace{14mu} {MeV}} \right)^{1\text{/}2}}$ where $R_{m} = {{k_{p}r_{m}} = \left\{ \frac{\ln \left( {1 + {a_{0}^{2}\text{/}2}} \right)}{\sqrt{1 + {a_{o}^{2}\text{/}2}} - 1 - {2{\ln \left\lbrack {\left( {\sqrt{1 + {a_{0}^{2}\text{/}2}} +} \right)\text{/}2} \right\rbrack}}} \right\}^{1\text{/}2}}$

The corresponding matched power is

$P_{L} = {{\frac{k_{p}^{2}r_{L}^{2}a_{0}^{2}}{32}P_{c}} \approx {{0.312\lbrack{TW}\rbrack}\frac{a_{0}R_{m}^{2}}{\kappa_{self}}\left( \frac{E_{b}\text{/}\alpha}{200\mspace{14mu} {MeV}} \right)}}$

The required laser pulse energy is given by U_(L)=P_(L)τ_(L).

Assuming the beam loading efficiency η_(b) ≡1−E_(z) ²/E_(M) ² defined by the fraction of the plasma wave energy absorbed by particles of the bunch with the root mean square (r.m.s) radius τ_(b), the beam-loaded field is given by E_(z)=√{square root over (1−η_(b))}E_(M)=αE_(M), where E_(M) is an accelerating field without beam loading. Thus a loaded charge is calculated as

$Q_{b} \approx {\frac{e}{4k_{L}r_{e}}\frac{\eta_{b}k_{p}^{2}\sigma_{b}^{2}}{\left( {1 - \eta_{b}} \right)}\frac{E_{z}}{E_{0}}\left( \frac{n_{c}}{n_{e}} \right)^{1\text{/}2}} \approx {{76\lbrack{pC}\rbrack}\frac{\eta_{b}k_{p}^{2}\sigma_{b}^{2}}{\left( {1 - \eta_{b}} \right)}\frac{E_{z}}{E_{0}}{\left( \frac{n_{e}}{10^{18}\left\lbrack {cm}^{- 3} \right\rbrack} \right)^{{- 1}\text{/}2}.}}$

Using the plasma density n_(e), the loaded charge is given by

$Q_{b} \approx {{55\lbrack{pC}\rbrack}\frac{\eta_{b}k_{p}^{2}\sigma_{b}^{2}}{\kappa_{self}^{1\text{/}2}\sqrt{1 - \eta_{b}}}\left( \frac{\lambda_{L}}{1\mspace{14mu} \mu \; m} \right)\left( \frac{E_{b}\text{/}\alpha}{200\mspace{14mu} {MeV}} \right)^{1\text{/}2}} \approx {{55\lbrack{pC}\rbrack}\frac{1 - \alpha^{2}}{a^{3\text{/}2}}\frac{k_{p}^{2}\sigma_{b}^{2}}{\kappa_{self}^{1\text{/}2}}\left( \frac{\lambda_{L}}{1\mspace{14mu} \mu \; m} \right){\left( \frac{E_{b}}{200\mspace{14mu} {MeV}} \right)^{1\text{/}2}.}}$

A field reduction factor α for accelerating a charge of electrons Q_(b) up to an energy E_(b) is obtained from α²+Cα^(3/2)−1=0, where C≡(Q_(b)/55 pC)κ_(self) ^(1/2)(k_(p) ²τ_(b) ²)⁻¹(1 μm/λ_(L))⁻¹(E_(b)/200 MeV)^(−1/2).

6.3. Detailed Description of the Beam Focusing System, Undulator and Beam Separator

Beam Focusing System

Beam transport and imaging from the laser plasma accelerator 6 to the undulator 13 is provided by a beam focusing system 12 with short focal length. The field gradient of the two dimensional Halbach-type permanent quadrupole magnet (PMQ) as shown in FIG. 6 is given by B′=2B_(r)(r_(i) ⁻¹−r_(o) ⁻¹), where B_(r) is the tip field strength, r_(i) is the bore radius and r_(o) is the outer radius of PMQ. With B_(r)=1.45 T for NdFeB material and r_(i)=2.5 mm, one can obtain the field gradient B′=1160 [T/m](1−2.5 [mm]/r_(o)). FIG. 6 illustrates schematically a twelve segments Halbach-type PMQ 31, 32 of a set of the quadrupole magnet 36, including a housing 33, 34 and a bracket 35 for supporting and positioning the PMQ. The quadrupole field is composed of four radially wedges of permanent magnet material 31, e.g., Nd₂Fe₁₄B or SmCO, with a high remanent field, of which the direction of magnetization is indicated by arrows. The outer field closure is formed by eight wedges of permanent magnet material 32. Since the four main wedges are strongly attracted toward of the center of the quadrupole, their mechanical precision and field accuracy can be achieved by the insertion of a nonmagnetic precision cylinder 33 into the center of the PMQ and by the housing case 34 outside the permanent quadrupole magnet (PMQ).

As shown in FIG. 7, the beam focusing system 12 comprises two to four permanent quadrupole magnets (PMQ), e.g. a doublet (FD), a triplet (FDF), or a quadruplet (FFDD) 36-39 installed into a housing chamber 46 with water cooling tubes 44. The longitudinal position of each permanent quadrupole magnet (PMQ) along the electron beam axis is optimized with a computer controlled mover system 40-43, comprising a vacuum linear motion manipulator driven by a stepping motor. Alignment of permanent quadrupole magnets (PMQ) is precisely constrained by a rail system 45.

Undulator

For a Extreme UltraViolet light source based on Free-Electron Laser, a planar undulator comprising alternating dipole magnets 52 is used, e.g., a pure permanent magnet (PPM) undulator with Nd₂Fe₁₄B blocks 50 as shown in FIG. 8 or a hybrid undulator comprising pure permanent magnets 50 and ferromagnetic poles 51 as shown in FIG. 9, e.g. a high saturation cobalt steel such as vanadium permendur or a simple iron. For a hybrid undulator, the thickness of the pole and magnet is optimized in order to maximize the peak field. In FIGS. 8 and 9, the arrows represent the direction of magnetization in the magnet blocks, of which a period is λ_(u). The minimum distance between the magnet jaws is a gap g. The peak field B_(u) of the gap is estimated in terms of the gap g and period λ_(u) according to B_(u)=a [T]exp[b(g/λ_(u))+c(g/λ_(u))²] for gap range 0.1<g/λ_(u)<1, where a=2.076 T, b=−3.24, c=0 for the pure permanent magnets planar undulator, a=3.694 T, b=−5.068, c=1.520 for the hybrid undulator with vanadium permendur, and a=3.381 T, b=−4.730, c=1.198 for the hybrid undulator with iron.

As shown in FIGS. 10A and 10B, the undulator 13 comprises a rectangular box frame 53, a gap adjusting mechanism 54 and cooling elements 55. The permanent magnet blocks 52 is attached to a thick base plate of the box frame 53 made of aluminium material. The alignment and gap of the undulator are adjusted by controlling the distance between two base plates of the box frame 53 with 4 or 6 adjusting mechanisms 54. Two monolithic water cooling elements 55 fabricated from tubing are connected to each magnet block 52.

Beam Separator

As shown in FIGS. 11A, 11B and 11C, a decelerated electron beam 10 after saturation is bent by a dipole field of permanent magnet (a beam separator 16) made of NdFeB material and dumped to a beam dump 17 made of copper with a water cooling element 56. The permanent magnet dipole (PMD) 16, e.g., Halbach-type permanent magnet dipole, comprises 8 wedges of the NdFeB material, of which the magnetization direction is shown by the arrows in FIG. 11B. The dipole field B_(D) of the Halbach-type permanent magnet dipole is given by B_(D)=B_(r) ln(r_(o)/r_(i)), where B_(r) is the tip field strength, r_(i) is the bore radius and r₀ is the outer radius of the PMD. With B_(r)=1.45 T for NdFeB material, r_(i)=5 mm and r_(o)=100 mm, one can obtain the dipole field B_(D)=4.34 T. The mechanical precision and field accuracy of the permanent magnet dipole 16 can be achieved by the insertion of a nonmagnetic precision cylinder 57 into the center of the permanent magnet dipole and by the housing case 58 outside the permanent magnet dipole. The electron beam 10 bent by the permanent magnet dipole field 16 is dumped to the copper beam dump 17, while the Extreme UltraViolet radiation 14 is extracted through a narrow Extreme UltraViolet output hole 59 machined in the beam dump 17 at the edge of the permanent magnet dipole bore. The permanent magnet dipole length required for deflecting d≈2r_(i) [mm] is given by L_(PMD) [cm]=10[(r_(i)/3.26 mm)(E_(b)/1 GeV)]^(1/2) for B_(D)=4.34 T (r_(o)/r_(i)=20). Since electrons lose energy by a factor of 1/e≃0.37 over the radiation length X₀=1.44 cm via electromagnetic cascades in the copper beam dump, almost all electrons with energy 1 GeV lose their energy inside the copper block with length 10X₀˜15 cm and diameter 7X₀˜10 cm. Both permanent magnet dipole and beam dump are cooled down by the water cooling elements 56.

The Free-Electron Laser Device

As shown in FIG. 12, the Free-Electron Laser device comprising the beam focusing system 12, the undulator 13 and the beam separator 16 and beam dump 17 is installed into vacuum chambers 11, 15 with vacuum pumping systems 28, 29 that maintain a pressure of the order of 10⁻⁴ Pa inside the chamber. The beam dump 17 connected to the beam separator 16 forms a monolithic device.

In self-amplified spontaneous emission (SASE) Free-Electron Laser process, coupling the electron bunch with a copropagating undulator radiation field induces the energy modulation of electrons that yields a current modulation of the bunch due to the dispersion of the undulator dipole fields, called microbunching. It means that the electrons are grouped into small bunches separated by a fixed distance that resonantly coincides with the wavelength of the radiation field. Consequently, the radiation field can be amplified coherently. When lacking an initial resonant radiation field, a seed may build up from spontaneous incoherent emission in the self-amplified spontaneous emission (SASE) process.

Design of Free-Electron Laser Based Extreme UltraViolet Light Source

A design of Free-Electron Laser based Extreme UltraViolet light source is made by the one-dimensional Free-Electron Laser theory as follows. The Free-Electron Laser amplication takes place in the undulator with the undulator period λ_(u) at the resonant wavelength given by

${\lambda_{X} = {\frac{\lambda_{u}}{2\gamma^{2}}\left( {1 + \frac{K^{2}}{2}} \right)}},$

where γ=E_(b)/m_(e)c² is the relativistic factor of the electron beam energy E_(b), and K_(u)=0.934B_(u) [T]λ_(u) [cm]=γθ_(e) is the undulator parameter, which is related to the maximum electron deflection angle θ_(e).

In the high-gain regime required for the operation of a self-amplified spontaneous emission (SASE) Free-Electron Laser, an important parameter is the Pierce parameter τ_(FEL) given by

$\rho_{FEL} = {\frac{1}{2\gamma}\left\lbrack {\frac{I_{b}}{I_{A}}\left( \frac{\lambda_{u}K_{u}A_{u}}{2{\pi\sigma}_{b}} \right)^{2}} \right\rbrack}^{1\text{/}3}$

where I_(b) is the beam current, I_(A)=17 kA is the Alfven current, σ_(b) is the root mean square (r.m.s) transverse size of the electron bunch, and the coupling factor is A_(u)=1 for a helical undulator and A_(u)=J₀(ξ)−J₁(ξ) for a planar undulator, where ξ=K_(u) ²/[4(1+K_(u) ²/2)] and J₀ and J₁ are the Bessel functions of the first kind.

Another important dimensionless parameter is the longitudinal velocity spread Λ of the beam normalized by the Pierce parameter:

${\Lambda^{2} = {{\frac{1}{\rho_{FEL}^{2}}\left\lbrack {\left( \frac{\sigma_{\gamma}}{\gamma} \right)^{2} + \left( \frac{{ɛ\gamma}_{u}}{4\lambda_{X}\beta} \right)^{2}} \right\rbrack} = {\frac{1}{\rho_{FEL}^{2}}\left\lbrack {\left( \frac{\sigma_{\gamma}}{\gamma} \right)^{2} + \left( \frac{ɛ_{n}^{2}}{2{\sigma_{b}^{2}\left( {1 + {K_{u}^{2}\text{/}2}} \right)}} \right)^{2}} \right\rbrack}}},$

where σ_(γ)/γ is the relative root mean square (r.m.s.) energy spread, ε is the r.m.s. transverse emittance, β=σ_(b) ²/ε is the beta function provided by the guiding field (undulator plus external focusing) and ε_(n) is the normalized emittance defined as ε_(n)≡γε assuming that a beta function is constant along the length of the undulator.

A e-folding gain length L_(gain) over which the power grows exponentially according to exp(2s/L_(gain)) is given by

$L_{gain} = {\frac{\lambda_{u}}{4\pi \sqrt{3}\rho_{FEL}}{\left( {1 + \Lambda^{2}} \right).}}$

In order to minimize the gain length, one needs a large Pierce parameter ρ_(FEL) and a normalized longitudinal velocity spread Λ sufficiently low compared to 1 that means a sufficiently small energy spread σ_(γ)/γ and ε. This expression applies to moderately small beam size σ_(b) such that the diffraction parameter B 1 where B is defined as

$B = {{\frac{16\pi^{2}A_{u}\sigma_{b}^{2}}{\lambda_{X}\lambda_{u}}\left\lbrack {\frac{K_{u}^{2}\text{/}2}{\gamma \left( {1 + {K_{u}^{2}\text{/}2}} \right)}\frac{I_{b}}{I_{A}}} \right\rbrack}^{1\text{/}2}.}$

A saturation length L_(sat) required to saturate the amplification can be expressed as

${L_{sat} = {L_{gain}\mspace{14mu} {\ln \left\lbrack {\left( \frac{\Lambda^{2} + {3\text{/}2}}{\Lambda^{2} + {1\text{/}6}} \right)\frac{P_{sat}}{P_{in}}} \right\rbrack}}},$

where P_(in) and P_(sat) are an input and a saturated power.

The input P_(in) and saturated power P_(sat) are related to an electron beam power P_(b) according to

P _(b) =γI _(b) m _(e) c ² =I _(b) E _(b),

P _(sat)≅1.37ρ_(FEL) P _(b)exp(−0.82Λ²),

P _(in)≅3√{square root over (4π)}ρ_(PEL) ² P _(b) [N _(λ) _(X) ln(N _(λ) _(X) /ρ_(FEL))]^(1/2)

where N_(λ) _(X) is the number of electrons per wavelength given by N_(λ) _(X) =I_(b)λ_(X)/(ec).

6.4. Embodiment of a Free-Electron Laser Used as an Extreme UltraViolet Source at 13.5 nm Wavelength

A fiber laser driven Laser Plasma Accelerator (LPA) based Free-Electron Laser produced Extreme UltraViolet radiation source at λ_(X)=13.5 nm wavelength using the undulator with period λ_(u)=5 mm (Case A), 10 mm (Case B), 15 mm (Case C), 20 mm (Case D) and 25 mm (Case E), all cases of which have the gap-period ratio g/λ_(u)=0.2, e.g. g=1 mm (Case A), 2 mm (Case B), 3 mm (Case C), 4 mm (Case D) and 5 mm (Case E), respectively. A hybrid undulator comprising NdFeB materials with grade N52, e.g., VACODYM® 722HR, and ferromagnetic materials such as tempered Co—Fe alloys (vanadium permendur), e.g., VACOFLUX® 50, provide the peak magnetic field B_(u) [T]=3.694exp(−5.068×0.2+1.520×0.2²)=1.425. The corresponding undulator parameter becomes K_(u)=0.1331λ_(u) [mm]=0.6655, 1.331, 1.9965, 2.662, 3.3275_(□) for λ_(u) [mm]=5, 10, 15, 20, 25_(□).

The electron beam energy E_(b) required for producing the Extreme UltraViolet radiation at the wavelength λ_(X)=13.5 nm is given by γ=192.45λ_(u) ^(1/2)(1+0.008858λ_(u) ²)^(1/2), i.e., E_(b) [MeV]=98.45λ_(u) ^(1/2)(1+0.008858λ_(u) ²)^(1/2). For Case A to E, γ=475.6, 835.7, 1290, 1834, 2460_(□) and E_(b) [MeV]=243, 427, 659, 937, 1257_(□).

The Laser Plasma Accelerator (LPA) can provide a high-peak current bunched beam, e.g., I_(A)=50 kA for electron charge Q_(b)=0.5 nC and bunch duration τ_(b) 10 fs. A fiber laser pulse with wavelength λ_(L)=1 μm after compression is focused on the entrance of gas cell at the normalized laser field a₀=2 corresponding to the laser intensity I=5.5×10¹⁸ Wcm⁻². Self-guided propagation of such laser pulse in the gas cell requires the group velocity correction factor κ_(self)=1.19 and the matched spot radius R_(m)≡k_(p)r_(m)=3.2. The wakefield reduction factor α due to loaded charge Q_(b) is calculated from α²+Cα^(3/2)−1=0 for the electron beam radius k_(p)σ_(b)=1, where the coefficients are C=9.0, 6.8, 5.5, 4.6, 4.0_(□) as α=0.223, 0.267, 0.302, 0.335, 0.364_(□), respectively, for Case A to E.

The important Laser Plasma Accelerator (LPA) parameters are provided as follows:

(1) The operating plasma density; n_(e)[10¹⁷ cm⁻³]=8.3, 5.6, 4.2, 3.2, 2.6

(2) The accelerator length; L_(acc) [mm]=18, 32, 51, 74, 102

(3) The required pulse duration; τ_(L) [fs]=46, 56, 65, 73, 82

(4) The matched spot radius; r_(m) [μm]=19, 23, 27, 30, 34

(5) The matched power; P_(L) [TW]=29, 43, 59, 75, 93

(6) The required laser pulse energy; U_(L) [J]=1.34, 2.40, 3.79, 5.52, 7.57

For the Free-Electron Laser operation, the coupling factor A_(u)(ξ) are A_(u)=0.9527, 0.8696, 0.8083, 0.7711, 0.7486 with ξ=0.09065, 0.2349, 0.3329, 0.3899, 0.4235 for Case A to E, respectively. The root mean square (r.m.s) transverse size of the electron bunch is set to σ_(b)=25 μm in the undulator and is usually much larger than the normalized transverse emittance ε_(n) of the order of 1 μm for the Laser Plasma Accelerator (LPA) produced electron beam. For the peak current I_(b)=50 kA with the number of electrons per wavelength N_(λ) _(N) =1.4×10⁷ and the diffraction parameter B 1, the important Free-Electron Laser parameters are given as follows according to the one-dimensional Free-Electron Laser theory:

(1) The Pierce parameter; ρ_(FEL) [%]=1.117, 1.507, 1.597, 1.596, 1.572

(2) The longitudinal velocity spread; Λ≈1 for setting σ_(γ)/γ≈ρ_(FEL)

(3) The e-folding gain length; L_(gain) [mm]=41, 61, 86, 115, 146

(4) The saturated power; P_(sat) [GW]≅0.6ρ_(FEL)P_(b)=82, 194, 317, 451, 596

(5) The input power; P_(in) [MW]=0.94, 3.03, 5.26, 7.48, 9.72

(6) The saturation length; L_(sat) [mm]=499, 721, 1016, 1355, 1723

(7) The total number of periods; N_(u)=100, 72, 68, 68, 69.

(8) The spectral bandwidth; Δλ_(X)/λ_(X) [%]˜1/N_(u)≈1.0, 1.4, 1.5, 1.5, 1.5

(9) The r.m.s. radiation cone angle;

${{\theta_{rms}\left\lbrack {\mu \; {rad}} \right\rbrack} = {{\frac{1}{2\gamma}\left( \frac{1 + {K_{u}^{2}\text{/}2}}{N_{u}} \right)^{1\text{/}2}} = 116}},97,82,71,63$

(10) The average power at the repetition frequency f_(rep) [MHz];

P _(av) [kW]˜P _(sat)τ_(X) f _(rep)=(0.82,1.94,3.17,4.51,5.96)×f _(rep) [MHz],

assuming the radiation duration τ_(X)=τ_(b)˜10 fs.

The repetition rate f_(rep) to be required for generating the average Extreme UltraViolet power of P_(EUV), =1 kW yields f_(rep) [MHz]≈P_(EUV)/(P_(sat)τ_(X))=1.22, 0.515, 0.315, 0.223, 0.168. For the production of 1 kW Extreme UltraViolet radiation, the average fiber laser power yields P_(Lav) [MW]≈U_(L)f_(rep)=1.63, 1.24, 1.19, 1.22, 1.27

Consequently, the minimum average laser power takes place for Case C with the undulator period 15 mm. The average beam power yields P_(bav) [kW]=Q_(b)f_(rep)E_(b)≈148, 110, 104, 104, 105. The efficiency of the electron beam acceleration is η_(laser→beam) [%]=P_(bav)/P_(Lav)≈9.1, 8.9, 8.7, 8.5, 8.3. The efficiency of the production of Extreme UltraViolet radiation yields η_(laser→EUV) [%]=0.061, 0.081, 0.084, 0.082, 0.079

Said Laser Plasma Accelerator (LPA) and Free-Electron Laser parameters for Case A to E producing the Extreme UltraViolet radiation of 1 kW at 13.5 nm wavelength are summarized as shown in Table 1.

TABLE 1 Examnles of the fiber laser driven Laser Plasma Accelerator (LPA) based Free-Electron Laser Extreme UltraViolet light source at 13.5 nm Case A B C D E Fiber laser parameters Laser wavelength [μm] 1 1 1 1 1 Average laser power [MW] 1.63 1.24 1.19 1.22 1.27 Repetition rate [MHz] 1.22 0.515 0.315 0.223 0.168 Laser energy per pulse [J] 1.34 2.40 3.79 5.52 7.57 Peak power [TW] 29 43 59 75 93 Pulse duration [fs] 46 56 65 73 82 Matched spot radius [μm] 19 23 27 30 34 LPA parameters Electron beam energy [MeV] 243 427 659 937 1257 Plasma density [10¹⁷ cm⁻³] 8.3 5.6 4.2 3.2 2.6 Accelerator length [mm] 18 32 51 74 102 Charge per bunch [nC] 0.5 0.5 0.5 0.5 0.5 Field reduction factor α 0.223 0.267 0.302 0.325 0.364 Bunch duration [fs] 10 10 10 10 10 Energy spread [%] ~1.1 ~1.5 ~1.6 ~1.6 ~1.6 Normalized emittance [mm mrad] ~1 ~1 ~1 ~1 ~1 Transverse beam size [μm] 25 25 25 25 25 Peak current [kA] 50 50 50 50 50 Average beam power [kW] 148 110 104 104 105 Efficiency of laser to beam [%] 9.1 8.9 8.7 8.5 8.3 FEL parameters Undulator period [mm] 5 10 15 20 25 Radiation wavelength [nm] 13.5 13.5 13.5 13.5 13.5 Gap [mm] 1 2 3 4 5 Peak magnetic field [T] 1.425 1.425 1.425 1.425 1.425 Undulator parameter K_(u) 0.666 1.33 2.00 2.66 3.33 Pierce parameter [%] 1.117 1.507 1.597 1.596 1.572 Gain length [mm] 41 61 86 115 146 Saturation length [mm] 499 721 1016 1355 1723 Number of periods 100 72 68 68 69 Spectral bandwidth [%] 1.0 1.4 1.5 1.5 1.5 r.m.s. Radiation cone angle [μrad] 116 97 82 71 63 Input power [MW] 0.94 3.03 5.26 7.48 9.72 Saturated power [GW] 82 194 317 451 596 Duration of EUV pulse [fs] 10 10 10 10 10 Average EUV power [kW] 1 1 1 1 1 Efficiency of EUV generation [%] 0.061 0.081 0.084 0.082 0.079

6.4. Embodiment of a Free-Electron Laser Used as an Extreme UltraViolet Source at 6.7 nm Wavelength

A fiber laser driven Laser Plasma Accelerator (LPA) based Free-Electron Laser produced Extreme UltraViolet radiation source at λ_(X)=6.7 nm wavelength using the undulator with period λ_(u)=5 mm (Case A), 10 mm (Case B), 15 mm (Case C), 20 mm (Case D) and 25 mm (Case E), all cases of which have the gap-period ratio g/λ_(u)=0.2, e.g. g=1 mm (Case A), 2 mm (Case B), 3 mm (Case C), 4 mm (Case D) and 5 mm (Case E), respectively. A hybrid undulator comprising NdFeB materials with grade N52, e.g., VACODYM® 722HR, and ferromagnetic materials such as tempered Co—Fe alloys (vanadium permendur), e.g., VACOFLUX® 50, provide the peak magnetic field B_(u) [T]=3.694exp(−5.068×0.2+1.520×0.2²)=1.425. The corresponding undulator parameter becomes K_(u)=0.1331λ_(u) [mm]=0.6655, 1.331, 1.9965, 2.662, 3.3275 for λ_(u) [mm]=5, 10, 15, 20, 25.

The electron beam energy E_(b) required for producing the Extreme UltraViolet radiation at the wavelength λ_(X)=6.7 is given by γ=273.18λ_(u) ^(1/2)(1+0.008858λ_(u) ²)^(1/2), i.e., E_(b) [MeV]=98.45λ_(u) ^(1/2)(1+0.008858λ_(u) ²)^(1/2). For Case A to E, γ=675.1, 1186, 1830, 2604, 3492 and E_(b) [MeV]=345, 606, 935, 1331, 1784.

The Laser Plasma Accelerator (LPA) can provide a high-peak current bunched beam, e.g., I_(A)=50 kA for electron charge Q_(b)=0.5 nC and bunch duration τ_(b) 10 fs. A fiber laser pulse with wavelength λ_(L)=1 μm after compression is focused on the entrance of gas cell at the normalized laser field a₀=2 corresponding to the laser intensity I=5.5×10¹⁸ Wcm⁻². Self-guided propagation of such laser pulse in the gas cell requires the group velocity correction factor κ_(self)=1.19 and the matched spot radius R_(m)≡k_(p)r_(m)=3.2. The wakefield reduction factor α due to loaded charge Q_(b) is calculated from α²+Cα^(3/2)−1=0 for the electron beam radius k_(p)σ_(b)=1, where the coefficients are C=7.55, 5.70, 4.59, 3.84, 3.32 as a=0.249, 0.295, 0.335, 0.369, 0.400, respectively, for Case A to E.

The important Laser Plasma Accelerator (LPA) parameters are provided as follows:

(1) The operating plasma density; n_(e)[10¹⁷ cm⁻³]=6.5, 4.4, 3.2, 2.5, 2.0

(2) The accelerator length; L_(acc) [mm]=26, 47, 74, 109, 150

(3) The required pulse duration; τ_(L) [fs]=52, 63, 73, 83, 93

(4) The matched spot radius; r_(m) [μm]=21, 26, 30, 34, 38

(5) The matched power; P_(L) [TW]=37, 55, 75, 97, 120

(6) The required laser pulse energy; U_(L) [J]=1.92, 3.47, 5.51, 8.06, 11.1

For the FEL operation, the coupling factor A_(u)(ξ) are A_(u)=0.9527, 0.8696, 0.8083, 0.7711, 0.7486 with ξ=0.09065, 0.2349, 0.3329, 0.3899, 0.4235 for Case A to E, respectively. The root mean square (r.m.s) transverse size of the electron bunch is set to σ_(b)=25 μm in the undulator and is usually much larger than the normalized transverse emittance ε_(n) of the order of 1 μm for the Laser Plasma Accelerator (LPA) produced electron beam. For the peak current I_(b)=50 kA with the number of electrons per wavelength N_(λ) _(X) =7×10⁶ and the diffraction parameter B 1, the important Free-Electron Laser parameters are given as follows according to the one-dimensional Free-Electron Laser theory:

(1) The Pierce parameter; ρ_(FEL) [%]=0.787, 1.061, 1.125, 1.125, 1.107

(2) The longitudinal velocity spread; Λ=1 for setting σ_(γ)/γ=ρ_(FEL)

(3) The e-folding gain length; L_(gain) [mm]=58.4, 86.6, 123, 163, 207

(4) The saturated power; P_(sat) [GW]=0.6ρ_(FEL)P_(b)=82, 194, 317, 451, 596

(5) The input power; P_(in) [MW]=0.94, 3.05, 5.3, 7.5, 9.8

(6) The saturation length; L_(sat) [mm]=709, 1024, 1441, 1923, 2445

(7) The total number of periods; N_(u)=142, 102, 96, 96, 98.

(8) The spectral bandwidth; Δλ_(X)/λ_(X) [%]˜1/N_(u)≃0.71, 0.98, 1.04, 1.04, 1.02

(9) The r.m.s. radiation cone angle; θ_(rms) [μrad]=69, 57, 48, 42, 37

(10) The average power at the repetition frequency f_(rep) [MHz];

P _(av) [kW]−P _(sat)τ_(X) f _(rep)=(0.82,1.94,3.17,4.51,5.96)×f _(rep) [MHz],

assuming the radiation duration τ_(X)≈τ_(b)−10 fs. The repetition rate f_(rep) to be required for generating the average EUV power of P_(EUV)=1.5 kW yields f_(rep) [MHz]≈P_(EUV)/(P_(sat)τ_(X))=1.83, 0.773, 0.473, 0.332, 0.252. For the production of 1.5 kW EUV radiation, the average fiber laser power yields P_(Lav) [MW]≈U_(L)f_(rep)=3.52, 2.68, 2.60, 2.68, 2.80

Consequently, the minimum average laser power takes place for Case C with the undulator period 15 mm. The average beam power yields P_(bav) [kW]=Q_(b) f_(rep)E_(b)≈316, 234, 221, 221, 225. The efficiency of the electron beam acceleration is η_(laser→beam) [%]=P_(bav)/P_(Lav)=8.97, 8.73, 8.49, 8.26, 8.03. The efficiency of the production of Extreme UltraViolet radiation yields η_(laser→EUV) [%]=0.043, 0.056, 0.058, 0.056, 0.054.

Said Laser Plasma Accelerator (LPA) and Free-Electron Laser parameters for Case A to E producing the Extreme UltraViolet radiation of 1 kW at 6.7 nm wavelength are summarized as shown in Table 2.

TABLE 2 Examples of the fiber laser driven Laser Plasma Accelerator (LPA) based Free-Electron Laser Extreme UltraViolet light source. Case A B C D E Fiber laser parameters Laser wavelength [μm] 1 1 1 1 1 Average laser power [MW] 3.52 2.68 2.60 2.68 2.80 Repetition rate [MHz] 1.83 0.773 0.473 0.332 0.252 Laser energy per pulse [J] 1.92 3.47 5.51 8.06 11.1 Peak power [TW] 37 55 75 97 120 Pulse duration [fs] 52 63 73 83 93 Matched spot radius [μm] 21 26 30 34 38 LPA parameters Electron beam energy [MeV] 345 606 935 1331 1784 Plasma density [10¹⁷ cm⁻³] 6.5 4.4 3.2 2.5 2.0 Accelerator length [mm] 26 47 74 109 150 Charge per bunch [nC] 0.5 0.5 0.5 0.5 0.5 Field reduction factor α 0.249 0.295 0.335 0.369 0.400 Bunch duration [fs] 10 10 10 10 10 Energy spread [%] ~0.8 ~1.1 ~1.1 ~1.1 ~1.1 Normalized emittance [mm mrad] ~1 ~1 ~1 ~1 ~1 Transverse beam size [μm] 25 25 25 25 25 Peak current [kA] 50 50 50 50 50 Average beam power [kW] 316 234 221 221 225 Efficiency of laser to beam [%] 9.0 8.7 8.5 8.3 8.0 FEL parameters Radiation wavelength [nm] 6.7 6.7 6.7 6.7 6.7 Undulator period [mm] 5 10 15 20 25 Gap [mm] 1 2 3 4 5 Peak magnetic field [T] 1.425 1.425 1.425 1.425 1.425 Undulator parameter K_(u) 0.666 1.33 2.00 2.66 3.33 Pierce parameter [%] 0.787 1.06 1.125 1.125 1.107 Gain length [mm] 58.4 86.6 123 163 207 Saturation length [mm] 709 1024 1441 1923 2445 Number of periods 142 102 96 96 98 Spectral bandwidth [%] 0.71 0.98 1.04 1.04 1.02 r.m.s. Radiation cone angle [μrad] 69 57 48 42 37 Input power [MW] 0.94 3.05 5.3 7.5 9.8 Saturated power [GW] 82 194 317 451 596 Duration of EUV pulse [fs] 10 10 10 10 10 Average EUV power [kW] 1.5 1.5 1.5 1.5 1.5 Efficiency of EUV generation [%] 0.043 0.056 0.058 0.056 0.054

6.5 Embodiment of Tuning a Free-Electron Laser for the Wavelength Range from 5 nm to 15 nm

The FEL amplification takes place in the undulator with the undulator period λ_(u) at the resonant wavelength given by

${\lambda_{X} = {\frac{\lambda_{u}}{2\gamma^{2}}\left( {1 + \frac{K_{u}^{2}}{2}} \right)}},$

where γ=E_(b)/m_(e)c² is the relativistic factor of the electron beam energy E_(b), K_(u)=0.934B_(u) [T]λ_(u) [cm]. Setting the peak magnetic field of the undulator to be B_(u)=1.425 T, the corresponding undulator parameter becomes K_(u)=0.1331λ_(u) [mm]=1.9965 for λ_(u)=15 mm (CASE C). The electron beam energy E_(b) required for producing the EUV radiation at the wavelength λ_(X) is given by

${E_{b}\lbrack{MeV}\rbrack} = {659\left( \frac{13.5\mspace{14mu} {nm}}{\lambda_{X}} \right)^{1\text{/}2}}$

The important Laser Plasma Accelerator (LPA) parameters are provided as a function of FEL wavelength λ_(X): (1) The operating plasma density;

$n_{e} \approx {4.2 \times {10^{17}\left\lbrack {cm}^{- 3} \right\rbrack}\left( \frac{\lambda_{X}}{13.5\mspace{14mu} {nm}} \right)^{1\text{/}2}}$

(2) The accelerator length;

$L_{acc} \approx {{51\lbrack{mm}\rbrack}\left( \frac{13.5\mspace{14mu} {nm}}{\lambda_{X}} \right)^{3\text{/}4}}$

(3) The required pulse duration;

$\tau_{L} = {{65\lbrack{fs}\rbrack}\left( \frac{13.5\mspace{14mu} {nm}}{\lambda_{X}} \right)^{1\text{/}4}}$

(4) The matched spot radius;

$r_{m} \approx {{27\left\lbrack {\mu \; m} \right\rbrack}\left( \frac{13.5\mspace{14mu} {nm}}{\lambda_{X}} \right)^{1\text{/}4}}$

(5) The required laser peak power;

$P_{L} \approx {{59\lbrack{TW}\rbrack}\left( \frac{13.5\mspace{14mu} {nm}}{\lambda_{X}} \right)^{1\text{/}2}}$

(6) The required laser pulse energy;

$U_{L} = {{3.8\lbrack J\rbrack}\left( \frac{13.5\mspace{14mu} {nm}}{\lambda_{X}} \right)^{3\text{/}4}}$

The important Free-Electron Laser parameters are all given as a function of FEL wavelength λ_(X): (1) The Pierce parameter;

$\rho_{FEL} = {{1.597\lbrack\%\rbrack}\left( \frac{\lambda_{X}}{13.5\mspace{14mu} {nm}} \right)^{1\text{/}2}}$

(2) The longitudinal velocity spread; Λ=1 for setting σ_(γ)/γ≈ρ_(FEL) (3) The e-folding gain length;

$L_{gain} = {{86\lbrack{mm}\rbrack}\left( \frac{13.5\mspace{14mu} {nm}}{\lambda_{X}} \right)^{1\text{/}2}}$

(4) The saturated power; P_(sat)=317 [GW] (5) The input power; P_(in)≈5.3 [MW] (6) The saturation length;

$L_{sat} = {{1016\lbrack{mm}\rbrack}\left( \frac{13.5\mspace{14mu} {nm}}{\lambda_{X}} \right)^{1\text{/}2}}$

(7) The total number of periods;

$N_{u} = {{L_{sat}\text{/}\lambda_{u}} = {68\left( \frac{13.5\mspace{14mu} {nm}}{\lambda_{X}} \right)^{1\text{/}2}}}$

(8) The spectral bandwidth; Δλ_(X)/λ_(X) 1/N_(u)≈1.5[%] (9) The r.m.s. radiation cone angle;

$\theta_{rms} = {{\frac{1}{2\gamma}\left( \frac{1 + {K_{u}^{2}\text{/}2}}{N_{u}} \right)^{1\text{/}2}} = {{82\left\lbrack {\mu \; {rad}} \right\rbrack}\left( \frac{\lambda_{X}}{13.5\mspace{14mu} {nm}} \right)^{1\text{/}4}}}$

(10) The average power at the repetition frequency f_(rep) [MHz];

P _(av) P _(sat)τ_(X) f _(rep)=3.17 [kW]f _(rep)

for the radiation duration τ_(X)≈τ_(b)˜10 fs. (11) The repetition rate f_(rep) to be required for generating the average Extreme UltraViolet power of P_(EUV)=1 kW;

f _(rep) ≈P _(EUV)/(P _(sat)τ_(X))=0.315 [MHz]

(12) The average fiber laser power for the production of 1 kW Extreme UltraViolet radiation;

${P_{Lav} \approx {U_{L}f_{rep}}} = {{1.19\lbrack{MW}\rbrack}\left( \frac{13.5\mspace{14mu} {nm}}{\lambda_{X}} \right)^{3\text{/}4}}$

(13) The average electron beam power;

$P_{bav} = {{Q_{b}f_{rep}E_{b}} = {{104\lbrack{kW}\rbrack}\left( \frac{13.5\mspace{14mu} {nm}}{\lambda_{X}} \right)^{1\text{/}2}}}$

(14) The efficiency of the electron beam acceleration;

$\eta_{{laser}\rightarrow{beam}} = {{P_{bav}\text{/}P_{Lav}} = {{8.7\lbrack\%\rbrack}\left( \frac{\lambda_{X}}{13.5\mspace{14mu} {nm}} \right)^{1\text{/}4}}}$

(15) The efficiency of the production of Extreme UltraViolet radiation;

$\eta_{{laser}\rightarrow{EUV}} = {{P_{EUV}\text{/}P_{Lav}} = {{0.084\lbrack\%\rbrack}\left( \frac{\lambda_{X}}{13.5\mspace{14mu} {nm}} \right)^{3\text{/}4}}}$

For undulator period λ_(u)=15 mm, the average Extreme UltraViolet power of P_(EUV)=1 kW, the electron beam energy E_(b), the operating plasma density n_(e), the accelerator length L_(acc), the required laser peak power P_(L), the required laser pulse energy U_(L), the Pierce parameter ρ_(FEL), the saturation length L_(sat), the average fiber laser power P_(Lav) and the efficiency of the production of Extreme UltraViolet radiation η_(eff) are shown as a function of the radiation wavelength λ_(X) for the range from 5 nm to 15 nm in FIG. 14, obtained for a given peak magnetic field and a given undulator period, which have been previously set (e.g. B_(u)=1.425 T and λ_(u)=15 mm.)

Other examples have been given respectively in table 1 and 2 of section 6.4 for other cases A, B, D, E, F related to other examples of ondulator period with B_(u)=1.425 T).

An exemplary embodiment of the present disclosure provides a new embodiment of a Free Electron Laser, which is more compact and efficient, cheaper and has a higher repetition rate and a higher average power than the prior art Free Electron Lasers.

An exemplary embodiment provides an efficient Free-Electron Laser-based Extreme UltraViolet light source, usable for industrial lithography technology.

CITATION LIST Patent Literature

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Although the present disclosure has been described with reference to one or more examples, workers skilled in the art will recognize that changes may be made in form and detail without departing from the scope of the disclosure and/or the appended claims. 

1. A Free Electron Laser source generating an electromagnetic beam presenting a wavelength, called Free Electron Laser wavelength λ_(X), belonging to the range from 5 nm to 15 nm, said Free Electron Laser comprising: a fiber-based laser, comprising a plurality of amplifying fibres wherein an initial laser pulse is distributed and amplified, and means for grouping together the elementary pulses amplified in said fibre in order to form an a single amplified global laser pulse, and comprising a stretching device able to stretch out in time said initial laser pulse, according to the chirped pulse amplification technique and a grating pulse compressor able to compress in time said single amplified global laser pulse, according to the chirped pulse amplification technique, said fiber-laser being tuned using at least one parameter, called fiber-based laser parameter, said at least one fiber-based laser parameter being obtained as a function of said Free Electron Laser wavelength λ_(X); a laser plasma accelerator wherein, in a bubble regime of said plasma accelerator said global laser pulse generates relativistic electron beams, said laser plasma accelerator being tuned using at least one parameter, called laser plasma accelerator parameter, said at least one laser plasma accelerator parameter being obtained as a function of said Free Electron Laser wavelength λ_(X); a beam focusing system transporting electron beams from the laser plasma accelerator to an undulator, said undulator wherein relativistic electron beams generate an electromagnetic beam, a peak magnetic field and a period of said undulator being previously set, said undulator being tuned using at least one parameter, called undulator parameter, said at least one undulator parameter being obtained as a function of said Free Electron Laser wavelength λ_(X); a beam separator system, wherein said electron beam and said electromagnetic beam are separated.
 2. A Free Electron Laser source according to claim 1 wherein said laser plasma accelerator comprises: a first gas cell filled with mixed gas, and a second gas cell filled with pure helium gas. a gas feeding system.
 3. A Free Electron Laser source according to claim 2 wherein said laser plasma accelerator comprise means for modifying a length of said second gas cell.
 4. A Free Electron Laser source according to claim 1 wherein said beam separator system comprises a dipole magnet for bending electron beams and a beam dump.
 5. A Free Electron Laser source according to claim 1 wherein said electromagnetic beam is a Extreme UltraViolet beam.
 6. A Free Electron Laser source according to claim 6 wherein said Extreme UltraViolet beam wavelength is 13.5 nm.
 7. A Free Electron Laser source according to claim 6 wherein said Extreme UltraViolet beam wavelength is 6.7 nm. 